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Cleanroom® MB Hexamethyldisilazane (HMDS)

Cleanroom® MB Hexamethyldisilazane (HMDS) is an adhesion promoter between photoresist and the silicon wafer.

Brand: Cleanroom (8 products)

Technical Data Sheet

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Applications & Uses

Properties

Contaminants
ValueUnitsTest Method / Conditions
Hexamethaldisilazane99.5 - 100%-
Colormax. 10APHA-
Watermax. 50ppb-
Residue After Evaporationmax. 3000ppb-
Heavy Metalsmax. 100ppb-
Chloride (Cl)max. 1000ppb-
Trailing Impurities0.01 - 0.1%-
Turbiditymax. 1NTU-
Refractive Indexmax. 1.406--
UV ( 270nm)max. 0.25l/g/cm-
Arsenic (As)max. 5ppb-
Antimony (Sb)max. 5ppb-
Aluminum (Al)max. 10ppb-
Barium (Ba)max. 10ppb-
Boron (B)max. 10ppb-
Cadmium (Cd)max. 10ppb-
Calcium (Ca)max. 20ppb-
Chromium (Cr)max. 20ppb-
Cobalt (Co)max. 20ppb-
Copper (Cu)max. 10ppb-
Gallium (Ga)max. 10ppb-
Germanium (Ge)max. 20ppb-
Gold (Au)max. 10ppb-
Iron (Fe)max. 20ppb-
Lead (Pb)max. 10ppb-
Lithium (Li)max. 10ppb-
Magnesium (Mg)max. 10ppb-
Manganese (Mn)max. 20ppb-
Nickel (Ni)max. 10ppb-
Potassium (K)max. 30ppb-
Silver (Ag)max. 10ppb-
Sodium (Na)max. 20ppb-
Strontiummax. 10ppb-
Tantalum (Ta)max. 20ppb-
Tin (Sn)max. 20ppb-
Zinc (Zn)max. 20ppb-
Zirconium (Zr)max. 10ppb-
Particle Count (0.5 Micron )max. 100par/ml-

Packaging & Availability

Packaging Type