SEMICOSIL® TEOS 999-LB

SEMICOSIL® TEOS 999-LB is an ultra-high-purity tetraethoxysilane (TEOS) known for its exceptional chemical purity, very good trace metal purity, and very good purity in terms of boron and chloride. This product has been specifically developed for the semiconductor industry and finds typical applications as a precursor for low-dielectric constant interlayer dielectrics and other related uses.

Brand: SEMICOSIL (27 products)

Functions: Precursor

Applicable Processes: Semiconductor Manufacturing

Features: High Purity

Synonyms: Ethyl Orthosilicate, Ethyl Silicate, Tetraethoxysilane, Tetraethyl Silicate

Technical Data Sheet

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Chemical Name
Industrial Additives Functions
CAS No.
78-10-4
Molecular formula
C₈H₂₀O₄Si
EC No.
201-083-8
Technologies
Product Families

Features & Benefits

Labeling Claims
Industrial Additives Features

Applications & Uses

Markets
Applications
Applicable Processes
Application Details

SEMICOSIL® TEOS 999 LB was developed for the Semiconductor Industry. A typical application is the use as precursor for low dielectric constant interlayer dielectrics.

Properties

Physical Form
Appearance
Colorless clear liquid
Soluble in
Most common organic solvents
Typical Properties
ValueUnitsTest Method / Conditions
Assaymin. 99.9%Gas Chromatography
Molecular Weight208.3g/mol-
Density (at 25°C)approx. 0.93 g/cm³DIN 51757
Refractive Index1.382--
Properties
  • Ultra high chemical purity
  • Excellent trace metal purity
  • Very good Boron purity
  • Very good chloride purity

Regulatory & Compliance

Packaging & Availability

Country Availability
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • North America
  • Oceania