Enhanced TDS
Knowde-enriched technical product data sheet
Identification & Functionality
- Chemical Family
- Chemical Name
- Industrial Additives Functions
- CAS No.
- 2031-67-6
- Molecular formula
- C₇H₁₈O₃Si
- EC No.
- 217-983-9
- Technologies
- Product Families
Features & Benefits
- Labeling Claims
- Industrial Additives Features
- Materials Features
Applications & Uses
- Markets
- Applications
- Applicable Processes
- Application Details
SEMICOSIL® M3E was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.
Properties
- Physical Form
- Appearance
- Colorless clear liquid
- Soluble in
- Organic solvents
- Typical Properties
Value Units Test Method / Conditions Assay 99 % Gas Chromatography Molecular Weight 178 g/mol - Boiling Point (at 1013 hPa) 143 °C - Density (at 25°C) 0.89 g/cm³ DIN 51757 Melting Point max. -40 °C - Refractive Index 1.3805 - 1.3815 - - - Properties
- High purity
- Low metal content
- Low chloride content
Regulatory & Compliance
- Certifications & Compliance
- Chemical Inventories
Packaging & Availability
- Country Availability
- Regional Availability