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SEMICOSIL® 6C2S

SEMICOSIL® 6C2S is a hyperpure hexachlorodisilane with ultra-high purity and low metal content. This product falls under the category of silanes used for chemical vapor deposition (CVD) and spin-on dielectrics (SOD). It was specifically developed for the semiconductor industry, serving as a precursor for low-temperature deposition processes and other applications within the field.

Brand: SEMICOSIL (27 products)

Functions: Precursor

Chemical Family: Silanes

Applicable Processes: Semiconductor Manufacturing

Technical Data Sheet

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Chemical Family
Silanes
Chemical Name
1,1,1,2,2,2-Hexachlorodisilane
Industrial Additives Functions
Precursor
Molecular formula
Cl₆Si₂
EC No.
236-704-1
CAS No.
13465-77-5
Technologies
Industrial Additives & Materials
Product Families
Industrial Additives & Materials — Battery & Electronic Materials
Electronic Chemicals

Features & Benefits

Labeling Claims
High Purity,
Low Metals Content

Applications & Uses

Markets
Electrical & Electronics
Applications
Electrical & Electronics — Parts & Components
Semiconductor Manufacturing
Applicable Processes
Semiconductor Manufacturing
Application Details

SEMICOSIL 6C2S was developed for the semiconductor industry, e.g. as precursor for low temperature deposition processes.

Properties

Physical Form
Liquid
Appearance
Colorless clear liquid
Soluble in
Organic solvents 
Typical Properties
ValueUnitsTest Method / Conditions
Boiling Point145°C-
Molecular Weight269--
Density (at 25°C)1.56g/cm³-
Hexachlorodisilanemin. 99.5%-
Hexachlorodisiloxanemax. 0.05%-
Melting Point-1°C-
Metallic Impurities Individualmax. 15.0 ppb-
Metallic Impurities Totalmax. 100.0 ppb-
Tetrachlorosilanemax. 0.2%-
Properties
  • Ultra high purity
  • Low metal content

Regulatory & Compliance

Certifications & Compliance
Comprehensive Environmental Response, Compensations & Liability Act (CERCLA),
K-REACH,
REACH (Europe)
Chemical Inventories
AICS (Australia),
ENCS (Japan),
IECSC (China),
PICCS (Phillipines),
TCSI (Taiwan),
TSCA (USA)

Packaging & Availability

Country Availability
Afghanistan,
Albania,
Algeria,
American Samoa,
Andorra,
Angola,
Anguilla,
Antigua And Barbuda,
Argentina,
Armenia,
Aruba,
Australia,
Austria,
Azerbaijan,
Bahamas,
Bahrain,
Bangladesh,
Barbados,
Belarus,
Belgium,
Belize,
Benin,
Bermuda,
Bhutan,
Bolivia,
Bosnia and Herzegovina,
Botswana,
Bouvet Island,
Brazil,
British Indian Ocean Territory,
Brunei Darussalam,
Bulgaria,
Burkina Faso,
Burundi,
Cambodia,
Cameroon,
Canada,
Cape Verde,
Cayman Islands,
Central African Republic,
Chad,
Chile,
China (Mainland),
Christmas Island,
Cocos Islands,
Colombia,
Comoros,
Congo,
Cook Islands,
Costa Rica,
Cote D'Ivoire,
Croatia,
Cuba,
Cyprus,
Czech Republic,
Denmark,
Djibouti,
Dominica,
Dominican Republic,
Ecuador,
Egypt,
El Salvador,
Equatorial Guinea,
Eritrea,
Estonia,
Ethiopia,
Falkland Islands,
Faroe Islands,
Fiji,
Finland,
France,
French Guiana,
French Polynesia,
Gabon,
Gambia,
Georgia,
Germany,
Ghana,
Gibraltar,
Greece,
Greenland,
Grenada,
Guadeloupe,
Guam,
Guatemala,
Guinea,
Guinea-Bissau,
Guyana,
Haiti,
Heard Island and McDonald Islands,
Honduras,
Hong Kong,
Hungary,
Iceland,
India,
Indonesia,
Iran,
Iraq,
Ireland,
Israel,
Italy,
Jamaica,
Japan,
Jordan,
Kazakhstan,
Kenya,
Kiribati,
Korea,
Kuwait,
Kyrgyzstan,
Laos,
Latvia,
Lebanon,
Lesotho,
Liberia,
Libyan Arab Jamahiriya,
Liechtenstein,
Lithuania,
Luxembourg,
Macao,
Macedonia,
Madagascar,
Malawi,
Malaysia,
Maldives,
Mali,
Malta,
Marshall Islands,
Martinique,
Mauritania,
Mauritius,
Mayotte,
Mexico,
Micronesia,
Moldova,
Monaco,
Mongolia,
Montenegro,
Montserrat,
Morocco,
Mozambique,
Myanmar,
Namibia,
Nauru,
Nepal,
Netherlands,
Netherlands Antilles,
New Caledonia,
New Zealand,
Nicaragua,
Niger,
Nigeria,
Niue,
Norfolk Island,
North Corea,
Northern Mariana Islands,
Norway,
Oman,
Pakistan,
Palau,
Palestinian Territory,
Panama,
Papua New Guinea,
Paraguay,
Peru,
Philippines,
Pitcairn,
Poland,
Portugal,
Puerto Rico,
Qatar,
Reunion,
Romania,
Russia,
Rwanda,
Saint Helena,
Saint Kitts and Nevis,
Saint Lucia,
Saint Pierre And Miquelon,
Saint Vincent And The Grenadines,
Samoa,
San Marino,
Sao Tome and Principe,
Saudi Arabia,
Senegal,
Serbia,
Seychelles,
Sierra Leone,
Singapore,
Slovakia,
Slovenia,
Solomon Islands,
Somalia,
South Africa,
Spain,
Sri Lanka,
Sudan,
Suriname,
Svalbard And Jan Mayen,
Swaziland,
Sweden,
Switzerland,
Syrian Arab Republic,
Taiwan,
Tajikistan,
Tanzania,
Thailand,
Togo,
Tokelau,
Tonga,
Trinidad And Tobago,
Tunisia,
Turkey,
Turkmenistan,
Turks And Caicos Islands,
Tuvalu,
USA,
Uganda,
Ukraine,
United Arab Emirates,
United Kingdom,
United States Minor Outlying Islands,
Uruguay,
Uzbekistan,
Vanuatu,
Vatican City,
Venezuela,
Vietnam,
Virgin Islands, British,
Virgin Islands, U.S.,
Wallis And Futuna,
Western Sahara,
Yemen,
Zambia,
Zimbabwe
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • North America
  • Oceania