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SEMICOSIL® 4MS-EL

SEMICOSIL® 4MS-EL is a high-purity silane compound specifically developed for the semiconductor industry. It is used as a precursor for low-dielectric-constant interlayer dielectrics in applications such as chemical vapor deposition (CVD) and spin-on dielectrics (SOD). This product is known for its high purity, low metal content, and low chloride content, ensuring optimal performance in semiconductor processes.

Brand: SEMICOSIL (27 products)

Functions: Precursor

Chemical Family: Silanes

Applicable Processes: Semiconductor Manufacturing

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Chemical Family
Silanes
Chemical Name
1,1,1,2,2,2-Hexachlorodisilane
Industrial Additives Functions
Precursor
EC No.
236-704-1
CAS No.
13465-77-5
Technologies
Industrial Additives & Materials
Product Families
Industrial Additives & Materials — Battery & Electronic Materials
Electronic Chemicals

Features & Benefits

Labeling Claims
High Purity,
Low Metals Content

Applications & Uses

Markets
Electrical & Electronics
Applications
Electrical & Electronics — Parts & Components
Semiconductor Manufacturing
Applicable Processes
Semiconductor Manufacturing

Properties

Physical Form
Liquid
Appearance
Clear colorless liquid
Odor
Characteristic odor
Soluble in
Organic solvents 
Typical Properties
ValueUnitsTest Method / Conditions
Assaymin. 99.9 %-
Boiling Point (at 1013 hPa)26°C-
Density (at 20°C)0.65g/cm³DIN 51757
Flash Point-20°CDIN 51755
HClmin. 15.0ppm-
Melting Point-95°C-
Refractive Index1.359--

Regulatory & Compliance

Certifications & Compliance
Comprehensive Environmental Response, Compensations & Liability Act (CERCLA),
K-REACH,
REACH (Europe)
Chemical Inventories
AICS (Australia),
ENCS (Japan),
IECSC (China),
PICCS (Phillipines),
TCSI (Taiwan),
TSCA (USA)

Packaging & Availability

Country Availability
Afghanistan,
Albania,
Algeria,
American Samoa,
Andorra,
Angola,
Anguilla,
Antigua And Barbuda,
Argentina,
Armenia,
Aruba,
Australia,
Austria,
Azerbaijan,
Bahamas,
Bahrain,
Bangladesh,
Barbados,
Belarus,
Belgium,
Belize,
Benin,
Bermuda,
Bhutan,
Bolivia,
Bosnia and Herzegovina,
Botswana,
Bouvet Island,
Brazil,
British Indian Ocean Territory,
Brunei Darussalam,
Bulgaria,
Burkina Faso,
Burundi,
Cambodia,
Cameroon,
Canada,
Cape Verde,
Cayman Islands,
Central African Republic,
Chad,
Chile,
China (Mainland),
Christmas Island,
Cocos Islands,
Colombia,
Comoros,
Congo,
Cook Islands,
Costa Rica,
Cote D'Ivoire,
Croatia,
Cuba,
Cyprus,
Czech Republic,
Denmark,
Djibouti,
Dominica,
Dominican Republic,
Ecuador,
Egypt,
El Salvador,
Equatorial Guinea,
Eritrea,
Estonia,
Ethiopia,
Falkland Islands,
Faroe Islands,
Fiji,
Finland,
France,
French Guiana,
French Polynesia,
Gabon,
Gambia,
Georgia,
Germany,
Ghana,
Gibraltar,
Greece,
Greenland,
Grenada,
Guadeloupe,
Guam,
Guatemala,
Guinea,
Guinea-Bissau,
Guyana,
Haiti,
Heard Island and McDonald Islands,
Honduras,
Hong Kong,
Hungary,
Iceland,
India,
Indonesia,
Iran,
Iraq,
Ireland,
Israel,
Italy,
Jamaica,
Japan,
Jordan,
Kazakhstan,
Kenya,
Kiribati,
Korea,
Kuwait,
Kyrgyzstan,
Laos,
Latvia,
Lebanon,
Lesotho,
Liberia,
Libyan Arab Jamahiriya,
Liechtenstein,
Lithuania,
Luxembourg,
Macao,
Macedonia,
Madagascar,
Malawi,
Malaysia,
Maldives,
Mali,
Malta,
Marshall Islands,
Martinique,
Mauritania,
Mauritius,
Mayotte,
Mexico,
Micronesia,
Moldova,
Monaco,
Mongolia,
Montenegro,
Montserrat,
Morocco,
Mozambique,
Myanmar,
Namibia,
Nauru,
Nepal,
Netherlands,
Netherlands Antilles,
New Caledonia,
New Zealand,
Nicaragua,
Niger,
Nigeria,
Niue,
Norfolk Island,
North Corea,
Northern Mariana Islands,
Norway,
Oman,
Pakistan,
Palau,
Palestinian Territory,
Panama,
Papua New Guinea,
Paraguay,
Peru,
Philippines,
Pitcairn,
Poland,
Portugal,
Puerto Rico,
Qatar,
Reunion,
Romania,
Russia,
Rwanda,
Saint Helena,
Saint Kitts and Nevis,
Saint Lucia,
Saint Pierre And Miquelon,
Saint Vincent And The Grenadines,
Samoa,
San Marino,
Sao Tome and Principe,
Saudi Arabia,
Senegal,
Serbia,
Seychelles,
Sierra Leone,
Singapore,
Slovakia,
Slovenia,
Solomon Islands,
Somalia,
South Africa,
Spain,
Sri Lanka,
Sudan,
Suriname,
Svalbard And Jan Mayen,
Swaziland,
Sweden,
Switzerland,
Syrian Arab Republic,
Taiwan,
Tajikistan,
Tanzania,
Thailand,
Togo,
Tokelau,
Tonga,
Trinidad And Tobago,
Tunisia,
Turkey,
Turkmenistan,
Turks And Caicos Islands,
Tuvalu,
USA,
Uganda,
Ukraine,
United Arab Emirates,
United Kingdom,
United States Minor Outlying Islands,
Uruguay,
Uzbekistan,
Vanuatu,
Vatican City,
Venezuela,
Vietnam,
Virgin Islands, British,
Virgin Islands, U.S.,
Wallis And Futuna,
Western Sahara,
Yemen,
Zambia,
Zimbabwe
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • North America
  • Oceania