Daikin Industries, Ltd. PFC-116 (C2F6)

Daikin Industries, Ltd. PFC-116 (C2F6) is a high-purity gas specifically formulated for semiconductor manufacturing. With an impressive purity level of 99.999 vol% (5N) or higher, it is aptly suited for cleaning applications within the semiconductor manufacturing process. This product caters to the electrical and electronics sectors, focusing on part and component fabrication.

Functions: Etchant

Applicable Processes: Semiconductor Manufacturing

Features: High Purity

Enhanced TDS

Knowde-enriched technical product data sheet

Identification & Functionality

Chemical Name
Industrial Additives Functions
CAS No.
76-16-4
EC No.
200-939-8
Technologies
Product Families
Chemical Formula

C₂F₆

Features & Benefits

Labeling Claims
Industrial Additives Features
Product Highlights
  • Purity is 99.999vol% (5N) or more for semiconductor manufacturing.
  • Suitable for cleaning applications mainly in the semiconductor manufacturing process.

Applications & Uses

Properties

Physical Form
Physical Properties
ValueUnitsTest Method / Conditions
Boiling Point-78.2°C-
Molecular Weight138.01--
Vapor Pressure (at 19.65°C)2.981MPa-

Technical Details & Test Data

Inspection Items

Purity (excluding air content), other fluorocarbons, acid content, moisture, air content

Safety & Health

Handling Method / Safety Information
  • Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.
  • This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.

Packaging & Availability

Packing Specification

10L container, 47L container, etc