Enhanced TDS
Knowde-enriched technical product data sheet
Identification & Functionality
- Chemical Name
- Industrial Additives Functions
- CAS No.
- 76-16-4
- EC No.
- 200-939-8
- Technologies
- Product Families
- Chemical Formula
C₂F₆
Features & Benefits
- Labeling Claims
- Industrial Additives Features
- Product Highlights
- Purity is 99.999vol% (5N) or more for semiconductor manufacturing.
- Suitable for cleaning applications mainly in the semiconductor manufacturing process.
Applications & Uses
- Markets
- Applications
- Applicable Processes
Properties
- Physical Form
- Physical Properties
Value Units Test Method / Conditions Boiling Point -78.2 °C - Molecular Weight 138.01 - - Vapor Pressure (at 19.65°C) 2.981 MPa -
Technical Details & Test Data
- Inspection Items
Purity (excluding air content), other fluorocarbons, acid content, moisture, air content
Safety & Health
- Handling Method / Safety Information
- Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.
- This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.
Packaging & Availability
- Packing Specification
10L container, 47L container, etc