Enhanced TDS
Knowde-enriched technical product data sheet
Identification & Functionality
- Chemical Name
- Industrial Additives Functions
- CAS No.
- 75-10-5
- EC No.
- 200-839-4
- Technologies
- Product Families
- Chemical Formula
CH₂F₂
Features & Benefits
- Labeling Claims
- Industrial Additives Features
- Product Highlights
- Purity is 99.99vol% (4N) or more for semiconductor manufacturing.
- Mainly suitable for etching SiO2, SiN and low-k films.
Applications & Uses
- Markets
- Applications
- Applicable Processes
Properties
- Physical Form
- Physical Properties
Value Units Test Method / Conditions Boiling Point -51.7 °C - Molecular Weight 52.02 - - Vapor Pressure (at 20°C) 1.39 MPa -
Technical Details & Test Data
- Inspection Items
Purity (excluding air content), other fluorocarbons, acid content, moisture, air content.
Safety & Health
- Handling Method / Safety Information
- Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.
- This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.
Packaging & Availability
- Packing Specification
10L container, 47L container, etc.