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SEMICOSIL® M3E

1 of 27 products in this brand
SEMICOSIL® M3E is a high-purity methyltriethoxysilane (M3E) known for its excellent purity, low metal content, and low chloride content. This product has been specifically developed for the semiconductor industry, serving as a precursor for low dielectric constant interlayer dielectrics and other applications.

Functions: Precursor

Chemical Family: Silanes

Applicable Processes: Semiconductor Manufacturing

Features: High Purity, Low Chloride Content

Synonyms: Methyltriethoxysilane, Monomethyltriethoxysilane, NSC 5226, Triethoxymethylsilane, Triethoxysilylmethane

Technical Data Sheet
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Identification & Functionality

Chemical Family
Industrial Additives Functions
CAS No.
2031-67-6
Molecular formula
C₇H₁₈O₃Si
EC No.
217-983-9

Features & Benefits

Industrial Additives Features
Materials Features

Applications & Uses

Applicable Processes
Application Details

SEMICOSIL® M3E was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.

Properties

Physical Form
Appearance
Colorless clear liquid
Soluble in
Organic solvents 
Typical Properties
ValueUnitsTest Method / Conditions
Assay99%Gas Chromatography
Molecular Weight178g/mol-
Boiling Point (at 1013 hPa)143°C-
Density (at 25°C)0.89g/cm³DIN 51757
Melting Pointmax. -40 °C-
Refractive Index1.3805 - 1.3815--
Properties
  • High purity
  • Low metal content
  • Low chloride content

Regulatory & Compliance

Packaging & Availability

Country Availability
Regional Availability
  • Africa
  • Asia
  • Europe
  • Latin America
  • Middle East
  • North America
  • Oceania